vFactory
Reference fab, seeded simulation and Design to wafer.
Windows · Linux · Cloud
vFactory is a new area next to DDS and ALcad for wafer processes and fabs.
Its views are Reference fab, Process models, Design to wafer, EUV calculation and EUV clip. vFactory is available in all 14 supported languages.
Reference fab
A logic fab of 300 tools on four levels.
Reference fab opens a logic fab of 300 tools, including four EUV scanners, on four levels: cleanroom, fan deck, subfab and utility floor. Choose from 200 to 400 tools or import a fab model file.
Lithography zone
Documented assumptions
All numerical process and building values are documented assumptions, not data from a real fab.
2D and 3D
From the top or at eye height.
Explore the fab on a 2D map, in 3D, from the top or at eye height.
Simulation
Seeded fab simulations.
Fab simulations are seeded, so the same seed gives the same result. You can import a fab model file and run it end to end, including preventive maintenance windows and operator breaks.
- Replay a finished simulation in the fab scene at 1× to 100,000× speed, with pause, restart and a time slider.
- The replay shows tool states, lots and FOUP moves between tools, exactly as the engine recorded them.
Design to wafer
Open a layout in Design to wafer.
In the GDS layout view of a Cloud project, Send to vFactory opens Design to wafer with that layout. It shows a 300 mm wafer map, Poisson, Murphy and negative binomial yield estimates with the defect density as a labelled assumption, lots in the reference fab, cycle time and delivery.
300 mm wafer map
Poisson, Murphy and negative binomial yield estimates
Design: Caravel by efabless, Apache-2.0.
- You can follow a lot in the 3D fab and save the result to the project.
EUV calculation
From the source to the wafer.
EUV calculation estimates photon and power budgets from the source to the wafer, including the Mo/Si multilayer mirrors, with editable presets. The model is uncalibrated, and every assumption is labelled.
Views
Explore the fab.
Product menu
In the product menu, choose vFactory → Wafer Process & Fab, which was under ALcad before.
At eye height
Walk with W, A, S and D, open doors with E, use the stairs.
Tool tags and distances
Follow a guided tour through the process areas, read tool tags and measure distances.
Inside an EUV scanner
Look inside an EUV scanner in 3D. Its scan motion follows the EUV calculation.
EUV clip
EUV clip computes a thin-mask aerial image for a clip of a GDS layout on your device.
Process models
Two measured-data panels show models built from public data sets. They are educational examples, not models of your fab.
Known limitations
Check the supported workflow.
- With WebGPU, the 3D views use realistic rendering at a quality tier chosen for your GPU. Without WebGPU, vFactory uses WebGL2 at the Low tier, and without either it shows the 2D plan.
- In EUV clip, Cloud imaging is not available yet. Use local tiling on your device.